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YOKOGAWA 3655E Analyzing recorder
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KURODA 15-08 C5H Ball screw 807mm
CITIZEN DTM-ED Electric micrometer
Mitsubishi Electric MR-J3-60B/HF-SP52B AC servo amplifier/AC servo motor
IKO LWL15B LM guide 2sets 270mm
SURUGA SEIKI BSS16-40C X-axis linear ball guide (SS) stage
NF Corporation 1940 Function synthesizer
Mitsubishi Electric FR-F720P-22K INVERTER
KSS FZ3702 Ball screw 89mm
KEYENCE TF2-21 Auto tuning type thermoregulator
ORIENTAL MOTOR US315-402(US315-02T/M315-402)/3GN50K SPEED CONTROL MOTOR
Mitsubishi Electric FR-U120-1.5K-F INVERTER
THK SHW17CRM LM guide 2sets 310mm
FUJI ELECTRIC M40-OA1 programmable controller (micrometerini series) 40-point basic unit
FUJI ELECTRIC M24E-1 ProgrammableController(μminiseries) 24-point extension unit
Mitsubishi Electric FR-D720-2.2K INVERTER
CHUO SEIKI TS-612 gonio stage
CHUO SEIKI TS-613 gonio stage
Fuji Electric FVR0.75E9S-2 INVERTER
THK SX Ball screw 80mm
OMRON CQM1H-II101 I/O interface unit
Mitsubishi Electric FR-E520-7.5K-C INVERTER
SIGMA KOKI TBM-601C X-axis aluminum stage
OMRON C200HW-DRM21-V1 Master unit
KENWOOD PA18-1.2A Power supply
OMRON K3GN-NDC Small digital panel meter
OMRON GT1-ID16 Digital I/O unit
OMRON CS1W-BC052 Programmable controller(CS1W series) CPU base unit
OMRON CP1E-E20DR-A Programmable controller (CP series) The CP1E CPU unit
KIKUSUI PMC110-0.6A General-purpose Compact Power
ANDO AG-4304/AG-4905 LCR meter
ETA ELECTRIC INDUSTRY VTM22WA Switching power supply
ETA ELECTRIC INDUSTRY ERB12SA Switching power supply
ETA ELECTRIC INDUSTRY VTC05SA Switching power supply
Mitsubishi Electric FR-E720-0.4K INVERTER
ETA ELECTRIC INDUSTRY ERE24SB Switching power supply
ETA ELECTRIC INDUSTRY SVB05SB Switching power supply
Mitsubishi Electric QY82P PLC (MELSEC-Q) output unit
Mitsubishi Electric FR-A024-2.2K INVERTER
SURUGA SEIKI B08-11-1/B08-12 XY axis Dovetail stage
SURUGA SEIKB08-11-1/B08-12R XY axis Dovetail stage
Mitsubishi Electric QD73A1 PLC (MELSEC-Q) positioning unit
ASAHI AS-103A-2A-11-1 Digital scaling meter
Agilent 10780F/10706B Remote Receiver (detector for laser heads)/Plane Mirror Optics (plain mirror interferometer)
Agilent E1300B/VME-P250/10897B Mainframe /High Resolution Laser Axis Board (3)/receiver cable (3).
ETA ELECTRIC INDUSTRY WRDJ21FWX-U Switching power supply
Mitsubishi Electric FX2N-48MT-D PLC (MELSEC-F) FX2N series
Mitsubishi Electric FX1S-30MR-D PLC (MELSEC-F) FX1S series
Mitsubishi Electric Q64AD2DA PLC (MELSEC-Q) analog - digital-to-digital - analog conversion unit
Mitsubishi Electric AJ65SBTB1-32TE1 CC-Link compact type remote I/O unit (transistor output, terminal block)